Aalto-Puurunen/dream-ald

DReaM-ALD is a MATLAB implementation of a diffusion–reaction model for simulating the conformality of atomic layer deposition in high-aspect-ratio microchannels.

语言：MATLAB · GitHub 星标：9 · Fork：2

话题：atomic-layer-deposition · conformality · diffusion-reaction-model · saturation-profile · thickness-profile

在 GitHub 上查看原仓库